Page 69 - Praxair - Specialty Gases and Equipment Reference Guide
P. 69

NF         3
            Nitrogen Trifluoride





            Transportation                                                      (M)SDS Reference
            Information                                                         P-4854
            UN Number: 2451                                                     CAS Number
                                  United States of America  Canada  Mexico
            Shipping Name        Nitrogen       Nitrogen      Nitrogen          7783 - 54 - 2
                                 Trifluoride    Trifluoride   Trifluoride       General Description
            Hazard Class         2.2 (5.1)      2.2 (5.1)     2.2               Colorless, odorless, nonflammable,
            Label                Nonflammable    Nonflammable   Nonflammable      corrosive, toxic gas.
                                 Gas, Oxidizer   Gas, Oxidizer   Gas, Oxidizer



              Product/Grade   Purity  Part      Cylinder  O 2  H 2 O  N 2  CO 2  N 2 O  CF 4  SF 6   CO  CH 4    Acidity
                                      Number
              Semiconductor, 4.0  99.99%  NF 4.0SP  K    5   1    5    3    3    40    5    1     1    1
              Concentrations given are ppm by volume unless otherwise specified.
              Maximum ppm unless otherwise noted.




              Cylinders

              Cylinder   Style            Size                Connection   Pressure    Volume     Gross Weight
              Type                        in (cm)             CGA/DISS     psig (bar)   lb (kg)   lb (kg)
              K         High Pressure Steel   51 x 9 (129.5 x 22.9)   330/640    1450 (145)   44 (20)   179 (81)





              Equipment Recommendations

                                                                                i

                                                                                See Section D for additional information
     Section B – Pure Gases
                                                                                on Praxair’s Semiconductor product
                                                                                line (pages D•143 - D•148).
                                                                                See our complete line of gas delivery
                                                                                systems in Section E, including
                                                                                gas cabinets, process panels, and
                                                                                controllers.

            UltraPurge  400 Gas Cabinet Series
                   ™
            (see page E •306)





















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