Page 279 - Praxair - Specialty Gases and Equipment Reference Guide

7000 Regulators

Special Purpose Regulators for Semiconductor Process Gases

Single Stage Electropolished 316L Stainless Steel Typical Applications
Barstock Body – Two, Three and Four Port n Semiconductor process gases
Configurations VCR Connections n Gas and liquid chromatography
The 7002 and 7003 Series regulators are intended for second- n Ultra high purity carrier gases
ary pressure control of the highest purity gases or as point of n Zero, span, and calibration gases
use pressure control in semiconductor process gas distribution
systems. The 7004 Series regulators are intended for primary
pressure control of semiconductor process gases as well as
applications requiring constant delivery pressure control,
regardless of supply pressure variations.

Features and Benefits of the 702, 703 and 704 Series Regulators
n Butt-Welded VCR n Pressure Ranges 0-15 to n Metal-to-Metal Diaphragm n Orientable Captured Vent
Connections 0-500 psig Seal Capable
Highest leak integrity available Broad range of applications Reduces possibility of gas Safe and easy installation
contamination
n 316 Stainless Steel n 3000 psig Inlet Pressure n Field Adjustable Pressure
Barstock Body Rating n 316L Stainless Steel Limit
Enhanced corrosion resistance Safe use with high Diaphragm Safeguard downstream
pressure cylinders No inboard diffusion equipment
n Front and Rear Panel
Mountable
Versatile system configuration

Specifications Materials
n Operating Pressure n Ports n Body n Nozzle
Vacuum to 500 psig (241 bar) 1/4" VCR 316L stainless steel 316L stainless steel
n Temperature Range n Helium Leak Integrity n Bonnet n Spring
-40 °F to 140 °F 1 x 10 scc/sec Chrome-plated brass barstock Elgiloy ®
-9
(-40 °C to 60 °C)
n Cv n Poppet n Seat
0.06 Stainless steel KEL-F 81
®
Ordering Information – Highlighted selection indicates most popular model
Series PRS7002-ABCD, PRS7003-ABCD and PRS7004-ABCD
A B C D
Series 7002 Outlet Pressure Outlet Gauge Inlet Gauge Port Configuration Assembly/Gauges
1: 0-15 psig 0: None 0: None 0: 1/4" Tube Stub 0: Bare Body
Section E – Gas Handling Equipment
2: 0-50 psig 1: FVCR x MVCR 1: Standard Assembly
3: 0-100 psig 2: MVCR x MVCR
3: MVCR x FVCR
4: FVCR x FVCR
5: IFS x IFS
(IFS = Internal Face Seal)

A B C D
Series 7003 Outlet Pressure Outlet Gauge Inlet Gauge Port Configuration Assembly/Gauges
1: 0-15 psig 30"-0-30 psig 0: None 0: 1/4" Tube Stub 0: Bare Body (Welded Gauge Ports)
2: 0-50 psig 30"-0-100 psig 1: FVCR x MVCR 1: Standard Assembly Welded Gauge Ports)
3: 0-100 psig 30"-0-200 psig 2: MVCR x MVCR 2: Bare Body (IFS Guage Ports)
3: MVCR x FVCR 3: Standard Assembly (IFS Gauge Ports)
4: FVCR x FVCR
5: IFS x IFS

A B C D
Series 7004 Outlet Pressure Outlet Gauge Inlet Gauge Port Configuration Assembly/Gauges
1: 0-15 psig 30"-0-30 psig 0: None 0: 1/4" Tube Stub 0: Bare Body (Welded Gauge Ports)
2: 0-50 psig 30"-0-100 psig 3: 0-4000 psig 1: FVCR x MVCR 1: Standard Assembly Welded Gauge Ports)
3: 0-100 psig 30"-0-200 psig 6: 0-1000 psig 2: MVCR x MVCR 2: Bare Body (IFS Guage Ports)
3: MVCR x FVCR 3: Standard Assembly (IFS Gauge Ports)
Other outlet pressure ranges
available upon request.

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