Page 40 - Praxair - Specialty Gases and Equipment Reference Guide
P. 40

SiH CI                     2
                                              Dichlorosilane
                                                                                                2




            Transportation                                                      (M)SDS Reference
            Information                                                         P-4587
            UN Number: 2189                                                     CAS Number
                                  United States of America  Canada  Mexico
            Shipping Name        Dichlorosilane   Dichlorosilane   Dichlorosilane  4109 - 96 - 0
            Hazard Class         2.3 (2.1) (8)   2.3 (2.1) (8)   2.3 (2.1) (8)  General Description
            Label                Toxic Gas,     Toxic Gas,    Toxic Gas,        Colorless, highly toxic, corrosive,
                                 Flammable Gas,   Flammable Gas,   Flammable Gas,  flammable, liquefied gas with a sharp,
                                 Corrosive      Corrosive     Corrosive         hydrochloric acid odor.



              Product/Grade     Purity   Part Number   Cylinder
              Semiconductor 3.5   99.95%   DI 3.5SP    K
              Semiconductor 3.0   99.9%   DI 3.0SP     K



                                Atmospheric Components                        Chemical Components

              Product/Grade     N 2    O 2  + Ar  CO   CO 2  CH 4   C 2 , C 3 , C 4  MCS  TCS  STC    HCI
                                ppm/v  ppm/v  ppm/v  ppm/v  ppm/v   ppm/v     ppm/w   ppm/w   ppm/w   ppm/w
              Semiconductor 3.5   1    1      1      1      1       1         250     200     10      150
              Semiconductor 3.0   1    1      –      –      –       –         250     500     200     –
              MCS = Monochlorosilane
              TCS = Trichlorosilane
              STC = Silicon Tetrachloride




                                Epi Film Components                                                                 Section B – Pure Gases
              Product/Grade     Al     B      P      As     Ga      In     Sb     C      O 2    Resistivity
                                ppb/a  ppb/a  ppb/a  ppb/a  ppb/a   ppb/a  ppb/a  ppm/a  ppm/a  ohm-cm
              Semiconductor 3.5   0.04   0.05   0.045   0.01   0.01   0.01   0.01   0.1   0.2   > 500
              Semiconductor 3.0   0.04   0.05   0.045   0.01   –    –      –      0.1    –      > 400




                                Metal Components
              Product/Grade     Fe     Ni     Cr     Na     Mo      Mn     Cu     Zn
                                ppb/w  ppb/w  ppb/w  ppb/w  ppb/w   ppb/w  ppb/w  ppb/w
              Semiconductor 3.5   1    0.2    0.2    0.2    0.2     0.2    0.2    0.2
              Semiconductor 3.0   3    –      –      –      –       –      –      –



              Cylinders

              Cylinder   Style            Size                Connection   Pressure    Volume     Gross Weight
              Type                        in (cm)             CGA/DISS     psig (bar)   lb (kg)   lb (kg)
              K         High Pressure Steel   51 x 9 (129.5 x 22.9)   678/636   9 (.62)   90 (40.9)   210 (95.45)



            i
            Contact your Praxair representative
            about equipment recommendations
            for Dichlorosilane.


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