Page 45 - Praxair - Specialty Gases and Equipment Reference Guide
P. 45

Enriched Germanium

            Tetrafluoride                          Ge F                   4
                                                                72



            Transportation                                                      MSDS Reference
            Information                                                         P-19-6362-E
            UN Number: 3308                                                     CAS Number
                                  United States of America  Canada  Mexico
            Shipping Name        Liquefied Gas,   Liquefied Gas,   Liquefied Gas,      848094 - 33 - 7
                                 Toxic, Corrosive,   Toxic, Corrosive,   Toxic, Corrosive,   General Description
                                 N.O.S.         N.O.S.        N.O.S.            A colorless, toxic, corrosive gas.
                                 Germanium      Germanium     Germanium
                                 Tetrafluoride   Tetrafluoride   Tetrafluoride
            Hazard Class         2.3 (8)        2.3 (8)       2.3 (8)
            Label                Toxic Gas,     Toxic Gas,    Toxic Gas,
                                 Corrosive      Corrosive     Corrosive




              Product/Grade    Purity   Part       Cylinder  Ge 72  Isotopic   N 2    Ar + O 2  CO 2  CO  SO 2
                                        Number               Enrichment
              Semiconductor, 4.0    99.99%   GT 4.0EN   G, LB,   50-52% Atomic   25   50   25    25    25
                                                   UpTime ®
              Concentrations given are ppm by volume unless otherwise specified.
              Maximum ppm unless otherwise noted.




              Cylinders

              Cylinder   Style            Size                Connection   Pressure    Volume     Gross Weight
              Type                        in (cm)             CGA/DISS     psig (bar)   gr (kg)   lb (kg)
              G         High Pressure Steel   20 X 6 (50.8 x 15.2)    330/642   205 (14.1)   8000 (8)   47 (21)
              LB        High Pressure Steel   16 x 2 (40.6 x 5.1)   330/642   205 (14.1)   400 (0.4)   8 (4)
              UpTime    Sub-Atmospheric   See page D •146 for all sub-atmospheric ion implant packaging.



     Section B – Pure Gases
              Equipment Recommendations

















            UltraPurge  400 Gas Cabinet Series
                   ™
            (see page E •306)












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