Page 75 - Praxair - Specialty Gases and Equipment Reference Guide

SiH 4
Silane

Transportation (M)SDS Reference
Information P-4649
UN Number: 2203 CAS Number
United States of America Canada Mexico
Shipping Name Silane Silane, Silane 7803 - 62 - 5
Compressed General Description
Hazard Class 2.1 2.1 2.1 Colorless, pyrophoric, flammable gas
Label Flammable Gas Flammable Gas Flammable Gas with a repulsive odor.

Product/ Purity Part Cylinder Ar O 2 CO 2 CO Total He Disilane
Grade Number Chlorosilanes
Semiconductor, 99.9999% SI 6.0SP K 0.05 0.06 0.05 0.05 0.15 1 0.5
6.0
Semiconductor, 99.997% SI 4.7SP K 1 0.1 0.5 0.5 0.5 5 –
4.7
Concentrations given are ppm by volume unless otherwise specified.
Maximum ppm unless otherwise noted.

Product/ Purity Part Cylinder H 2 CH 4 N 2 H 2 O Disiloxane Methylsilane Resistivity
Grade Number
Semiconductor, 99.9999% SI 6.0SP K 20 0.05 1 0.5 0.5 0.5 >/= 10000
6.0 ohm-cm
Semiconductor, 99.997% SI 4.7SP K 100 0.5 5 2 – – >/= 7500
4.7 ohm-cm
Concentrations given are ppm by volume unless otherwise specified.
Maximum ppm unless otherwise noted.
C 2 , C 3 , C 4 = C 2 H 6 ; C 3 H 8 ; C 4 H 10 .
(1)

Section B – Pure Gases
Semiconductor (from polysilicon deposited silane)
i
Component Specification Specification
Semiconductor 6.0 Semiconductor 4.7 Due to code regulations full
C 0.2 ppm/a 0.4 ppm/a containment within a gas cabinet
P 20 ppt/a 100 ppt/a is required for Silane.
B 20 ppt/a 40 ppt/a
As 5 ppt/a 20 ppt/a See our complete line of gas
Al 5 ppt/a 20 ppt/a cabinets, process panels, and
Ga, Sb, In 5 ppt/a each 20 ppt/a each controllers (pages E•304 - E•309).
Fe + Cr + Ni + 1 ppb/a –
Cu + Zn

Cylinders

Cylinder Style Size Connection Pressure Volume Gross Weight
Type in (cm) CGA/DISS psig (bar) lb (kg) lb (kg)
K High Pressure Steel 51 x 9 (129.5 x 22.9) 350/632 1040 (72) 22 (10) 155 (70)
K High Pressure Steel 51 x 9 (129.5 x 22.9) 350/632 1040 (72) 11 (5) 144 (65)

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