Page 76 - Praxair - Specialty Gases and Equipment Reference Guide

SiCI 4
Silicon Tetrachloride

Transportation (M)SDS Reference
Information P-4824
UN Number: 1818 CAS Number
United States of America Canada Mexico
Shipping Name Silicon Silicon Silicon 10026 - 04 - 7
Tetrachloride Tetrachloride Tetrachloride General Description
Hazard Class 8 8 8 Colorless, highly toxic, nonflammable
Label Corrosive Corrosive Corrosive liquid with a pungent odor.

Product/ Purity Part Cylinder
Grade Number
Semiconductor, 99.99% ST 4.0SP ST55,
4.0 ST10

HCI TCS Other Carbon Boron P As Al Resistivity Other
Chlorosilanes Metals (1)
15 10 0.02 0.05 0.2 1.0 0.05 0.05 1000 5
ppm/wt ppm/wt %wt ppm/a ppb/a ppb/a ppb/a ppb/a ohm-cm ppb/wt

Product/ Purity Part Cylinder HCl TCS Al Fe Other
Grade Number Metals (2)
Fiber Optic, 4.0 99.99% ST 4.0FO ST55, 15 10 25 50 100
ST10 ppm/wt ppm/wt ppb/wt ppb/wt ppb/wt Section B – Pure Gases

Product/ Purity Part Cylinder Boron Carbon Donor Other Resistivity
Grade Number (P & As) Chlorosilanes
Semiconductor, 99.98% ST 3.8SP ST55, ST10, 1 1 2 0.06% wt > 100 ohm-cm
3.8 SB ppb/a ppm/a ppb/a

Concentrations given are ppm by volume unless otherwise specified.
Maximum ppm unless otherwise noted.
Available with hydrogen or nitrogen pressure pads upon request.
(1) Other metals defined as Al, Fe, Ni, Cu, Cr, Mg, Mn, Zn, Ti, < 5 ppb/w each.
(2) Other metals defined as Ni, Cu, Cr, Mg < 100 ppb/w each.

Cylinders

Cylinder Style Size Connection Pressure Volume Gross Weight
Type in (cm) CGA/DISS psig (bar) lb (kg) lb (kg)
ST55 Low Pressure Drum 46 x 24 (116.84 x 60.96) Based on 0 600 (272) 850 (385)
application
ST10 Low Pressure Drum 30 x 12 (76.2 x 30.48) Based on 0 100 (45) 150 (68)
application
SB Low Pressure Drum 44 x 9 (111.7 x 22.8) Based on 0 110 (50) 142 (65)
application

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Contact your Praxair representative about equipment
recommendations for Silicon Tetrachloride.

1-877-PRAXAIR www.praxairdirect.com B•75