Page 28 - Praxair - Specialty Gases and Equipment Reference Guide
P. 28

BCI             3
                                              Boron Trichloride





            Transportation                                                      (M)SDS Reference
            Information                                                         P-4566
            UN Number: 1741                                                     CAS Number
                                  United States of America  Canada  Mexico
            Shipping Name        Boron          Boron         Boron             10294 - 34 - 5
                                 Trichloride    Trichloride   Trichloride       General Description
            Hazard Class         2.3 (8)        2.3 (8)       2.3               Colorless, toxic, corrosive, nonflammable,
            Label                Toxic Gas,     Toxic Gas,    Toxic Gas,        liquefied gas with a pungent choking odor.
                                 Corrosive      Corrosive     Corrosive



              Product/     Purity   Part     Cylinder   O 2  CO  N 2  CH 4  CO 2  Silicon  COCl 2  Cl 2  HCL
              Grade                 Number                                             (phosgene)
              Semiconductor,   99.999%   BC 5.0SP   K, G   3   0.5   10   0.2   0.2   1   1       1    5
              5.0                                                               ppm/w
              Semiconductor,   99.96%   BC 3.6SP   K, G   –   –   –   –   –     10     300        100   –
              3.6                                                               ppm/w
              Concentrations given are ppm by volume unless otherwise specified.
              Maximum ppm unless otherwise noted.




              Cylinders
              Cylinder   Style           Size                Connection    Pressure   Volume      Gross Weight
              Type                       in (cm)             CGA/DISS     psig (bar)   lb (kg)    lb (kg)
              K        High Pressure Steel   51 x 9 (129.5 x 22.9)   660/634   4.4 (0.30)   100 (45.36)   223 (101)  Section B – Pure Gases
              G        High Pressure Steel   20 x 6 (50.8 x 15.2)   660/634   4.4 (0.30)   14 (6.35)   43 (20)





                                                                                i
              Equipment Recommendations
              Semiconductor, 5.0   Gas cabinets                                 See Section D for additional information
              Semiconductor, 3.6    Gas cabinets                                on Praxair’s Semiconductor product
                                                                                line (pages D•143 - D•148).
                                                                                See our complete line of gas delivery
                                                                                systems in Section E, including
                                                                                gas cabinets, process panels, and
                                                                                controllers.
                                              UltraPurge  400 Gas Cabinet Series
                                                     ™
                                              (see page E •306)




















            1-877-PRAXAIR                     www.praxairdirect.com                                        B•27
   23   24   25   26   27   28   29   30   31   32   33