Page 30 - Praxair - Specialty Gases and Equipment Reference Guide
P. 30

BF         3
                                              Boron Trifluoride





            Transportation                                                      (M)SDS Reference
            Information                                                         P-4567
            UN Number: 1008                                                     CAS Number
                                  United States of America  Canada  Mexico
            Shipping Name        Boron          Boron         Boron             7637 - 07 - 2
                                 Trifluoride    Trifluoride   Trifluoride       General Description
            Hazard Class         2.3 (8)        2.3 (8)       2.3 (8)           Colorless, toxic, corrosive, nonflammable
            Label                Toxic Gas,     Toxic Gas,    Toxic Gas,        gas with a pungent odor.
                                 Corrosive      Corrosive     Corrosive



              Product/Grade     Purity   Part Number    Cylinder   Air        SO 2        SiF 4
              Semiconductor, 2.5   99.5%   BF 2.5SP    L4, ELB   4000 ppm/w   20 ppm/w    300 ppm/w
              Maximum ppm unless otherwise noted.




              Cylinders
              Cylinder   Style            Size                 Connection    Pressure   Volume    Gross Weight
              Type                        in (cm)              CGA/DISS     psig (bar)   grams    lb (kg)
              L4        High Pressure Steel   14 x 4.2 (35.5 x 10.6)   330/642   675 (46.5)   400   11 (5)
              ELB       High Pressure Steel   16 x 2 (40.6 x 5)   330/642   700 (48.3)   80       6 (3)





              Equipment Recommendations                                                                             Section B – Pure Gases







                                                                                i

                                                                                See Section D for additional information
                                                                                on Praxair’s Semiconductor product
                                                                                line (pages D•143 - D•148).
                                                                                See our complete line of gas delivery
                                                                                systems in Section E, including
                                                                                gas cabinets, process panels, and
                                                                                controllers.
            SurePurge  1500 –
                   ™
            Two Cylinder Cabinet
            (see page E •306)
















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