Page 29 - Praxair - Specialty Gases and Equipment Reference Guide
P. 29

Isotopically Enriched                               11

            BF   3                                        B F             3




            Transportation                                                      (M)SDS Reference
            Information                                                         P-4820-C
            UN Number: 1008                                                     CAS Number
                                  United States of America  Canada  Mexico
            Shipping Name        Boron          Boron         Boron             20654 - 88 - 0
                                 Trifluoride    Trifluoride   Trifluoride       General Description
            Hazard Class         2.3 (8)        2.3 (8)       2.3 (8)           Colorless, toxic, corrosive, nonflammable
            Label                Toxic Gas,     Toxic Gas,    Toxic Gas,        gas with a pungent odor.
                                 Corrosive      Corrosive     Corrosive



              Product/Grade  Purity   Cylinder  Isotopic     N 2    Ar   O 2   CO 2    HF   SO 2
                                                Enrichment
              Semiconductor,    99.9%   L4, ELB,   99.7%     25    25    25    25     25    25
              3.0                     UpTime ®
              Concentrations given are ppm by volume unless otherwise specified.
              Maximum ppm unless otherwise noted.




              Cylinders
              Cylinder   Style             Size                Connection    Pressure   Volume   Gross Weight
              Type                         in (cm)             CGA/DISS     psig (bar)   gr (kg)    lb (kg)
              L4        High  Pressure Steel   14 x 4.2 (35.5 x 10.6)   330/642   675 (46.5)   400 (0.4)    11 (5)
              ELB       High  Pressure Steel   16 x 2 (40.6 x 5)   330/642   700 (48.3)   80     6 (3)
              UpTime    Sub-Atmospheric    See page D •146 for all sub-atmospheric ion implant packaging.




              Equipment Recommendations

     Section B – Pure Gases




                                                                                i

                                                                                See Section D for additional information
                                                                                on Praxair’s Semiconductor product
                                                                                line (pages D•143 - D•148).
                                                                                See our complete line of gas delivery
                                                                                systems in Section E, including
                                                                                gas cabinets, process panels, and
                                                                                controllers.
            UpTime Sub-Atmospheric packaging
            (see page D •146)












            B•28                              1-877-PRAXAIR                     www.praxairdirect.com
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