Page 46 - Praxair - Specialty Gases and Equipment Reference Guide

Halocarbon-14

(Tetrafluoromethane) CF 4

Transportation M(SDS) Reference
Information P-4665
UN Number: 1982 CAS Number
United States of America Canada Mexico
Shipping Name Tetrafluoromethane Tetrafluoromethane Tetrafluoromethane 75 - 73 - 0
Hazard Class 2.2 2.2 2.2 General Description
Label Nonflammable Nonflammable Nonflammable Colorless, nonflammable gas.
Gas Gas Gas

Product Purity Part Cylinder N 2 O 2 H 2 O CO 2 CO Halocarbons CH 4 SF 6 Acidity
Grade Number (HF)
Semiconductor, 99.999% HA 145.0SP K, G 5 2 1 1 1 2 1 1 0.1
5.0 ppm/wt
Semiconductor, 99.997% HA 144.7SP K, G 15 5 1 1 1 4 1 1 0.1
4.7 ppm/wt
Semiconductor, 99.99% HA 144.0SP K, G 60 15 1 5 5 10 3 1 0.1
4.0 ppm/wt
Semiconductor, 99.9% HA 143.0SP K, G 400 100 5 5 5 20 – 5 1
3.0 ppm/wt
Concentrations given are ppm by volume unless otherwise specified.
Maximum ppm unless otherwise noted.

Cylinders Section B – Pure Gases

Cylinder Style Size Connection Pressure Volume Gross Weight
Type in (cm) CGA/DISS psig (bar) lb (kg) lb (kg)
K High Pressure Steel 51 x 9 (129.5 x 22.9) 580/716 2000 (139) 70 (32.7) 200 (91)
G High Pressure Steel 20 x 6 (50.8 x 15.2) 580/716 2000 (139) 12 (5.4) 41 (18.6)

Equipment Recommendations
Semiconductor, 5.0 Valve panels
Semiconductor, 4.7 Valve panels
Semiconductor, 4.0 7000 and 4000 series regulators
Semiconductor, 3.0 7000 and 4000 series regulators

i

See Section D for additional information
on Praxair’s Semiconductor product
line (pages D•143 - D•148).
Praxair is a full service supplier
for all your halocarbon needs.
UP2 Manual Purge Panel
(see page E •307)

1-877-PRAXAIR www.praxairdirect.com B•45