Page 50 - Praxair - Specialty Gases and Equipment Reference Guide

Halocarbon-116

(Hexafluoroethane) C 2F 6

Transportation (M)SDS Reference
Information P-4670
UN Number: 2193 CAS Number
United States of America Canada Mexico
Shipping Name Hexafluoro- Hexafluoro- Hexafluoro- 76 - 16 - 4
ethane ethane, ethane General Description
Compressed Colorless, odorless, nonflammable,
Hazard Class 2.2 2.2 2.2 liquefied gas.
Label Nonflammable Nonflammable Nonflammable
Gas Gas Gas

Product/ Purity Part Cylinder N 2 O 2 H 2 O CO 2 CO Other Acidity
Grade Number Halocarbons (HCl)
Semiconductor, 99.999% HA 1165.0SP K, G 4 1 3 1 1 5 0.1
5.0 ppm/wt
Semiconductor, 99.996% HA 1164.6SP K, G 20 5 2 3 2 10 0.1
4.6 ppm/wt
Semiconductor, 99.96% HA 1163.6SP K, G 100 25 10 5 5 50 0.1
3.6 ppm/wt
Concentrations given are ppm by volume unless otherwise specified.
Maximum ppm unless otherwise noted.

Cylinders Section B – Pure Gases

Cylinder Style Size Connection Pressure Volume Gross Weight
Type in (cm) CGA/DISS psig (bar) lb (kg) lb (kg)
K High Pressure Steel 51 x 9 (129.5 x 22.9) 660/716 430 (26.65) 95 (43.1) 230 (105)
G High Pressure Steel 20 x 6 (50.8 x 15.2) 660/716 430 (26.65) 17 (7.7) 46 (21)

Equipment Recommendations
Semiconductor, 5.0 Valve panels
Semiconductor, 4.6 7000 and 4000 series regulators
Semiconductor, 3.6 7000 and 4000 series regulators

i

Praxair’s extensive distribution
network ensures on-time delivery.

Bulk quantities available
upon request.
7002 Regulator
(see page E •278)

1-877-PRAXAIR www.praxairdirect.com B•49