Page 308 - Praxair - Specialty Gases and Equipment Reference Guide

Gas Delivery Systems

Semiconductor Gas Cabinets, Panels and Controllers

Process Panels*

UP6 Process Panel UP2 Manual Purge Panel WP5M Manual Process Panel
for Hazardous Gas Service

Reliable Safe Operation
n Fully automatic switchover capability for n Vent system with integral venturi valve n Fully swept flow paths
uninterrupted gas flow assures efficient purging n Continuous vent bleed system allows
n Industry standard UHP components n Mirror-finish stainless steel backplate nitrogen flow to discharge from the
n Leak tested and certified to maximize facilitates component inspection system during power failure
system integrity n Two-point fastened pigtails prevent n Engineered to improve purge efficiency
transmission of torque to VCR and reduce entrapment areas
®
connection
Easy to Use n All pneumatic valves are closed during
n Positive flow of purge gas out of pigtails power loss or pneumatic failure
n Single plane design with removable while changing cylinders helps prevent
manifolds for easy maintenance atmospheric contamination
i Other valve manifold configurations Section E – Gas Handling Equipment
are available upon request.

Automatic System Controllers

™
™
SurePurge 100 PLC Controller SurePurge 8100 System Monitor SurePurge AWS 100 Auto Switchover
™
Used to control PRS6 Panel System monitoring device for gas cabinets Required to perform auto-switching
n Enhanced safety and security through four n Features plug in replacement for n Features plug in replacement for ASW100
level password protocol SM8100/EES series controllers series controllers
n One of the smallest Programmable n Reliable PLC platform n Reliable PLC platform
Logic Controllers (PLC) on the market n Touch screen interface n Touch screen interface
n Plug and play replacement model for the n Configurable for one or two semiautomatic n Configurable for one or two semiautomatic
UP100 UltraPurge ™ panels panels
n Program an automatic purge routine n Scale inputs built in n Scale inputs built in
n Advanced communication options allow n User Configurable Alarms n User Configurable Alarms
remote monitoring of your cabinet n Main screen shown n Main screen shown
i Let our trained experts help you select a configuration
based on your specific needs, contact your local
Praxair representative for more information.

1-877-PRAXAIR www.praxairdirect.com E•307