Page 305 - Praxair - Specialty Gases and Equipment Reference Guide

Gas Delivery Systems

Gas Cabinet Systems

Praxair UHP (Ultra High Purity) Gas Cabinet Systems
The ProSpec UHP series gas cabinets offer the safest and most
™
reliable means to deliver Hazardous and Non-Hazardous gases.
ProSpec cabinets feature Semiconductor Grade components
and are widely used throughout the Micro and Nanotechnology
Industries. All models feature high integrity VCR fittings and 316L
EP (Electropolished) Wetted Components. The control systems
utilize state of the art PLC’s ( Programmable Logic Controllers )
to provide non-interruptible gas service from small to very large
scale gas delivery systems. Manual to Fully automatic versions
are available. Pulse/Purge cylinder change systems provide a
high level of safety and gas purity by removing residual process
gas and contaminants during cylinder change and maintenance
operations.

Benefits
n UHP Gas Delivery n Safety and Security –
n Indoor/Outdoor Installations Locking Door Standard
n Meets or Exceeds Code
n Limit personnel exposure
Requirements for HPM Gases

Typical Configurations Standard Features
n One Cylinder Cabinet – n 11 Gauge Steel construction
Process Cylinder with powder coat finish
n Regulator Panel with n Exhausted Enclosure with
Pulse/Purge efficient design to reduce
n SP100 PLC Controller facilities exhaust requirements
n 6 Valve Panel
n Custom Panel Assembly n Self closing door and access
Available by Request and window
Safety Review n Exhaust monitor alarms if
n Requires exterior Purge panel facilities exhaust fan fails
n Two Cylinder Cabinet – n Built in Sprinkler to meet NFPA
Process/Process or codes
Process/Purge n Excess Flow Switch
n Regulator Panels with
Pulse/Purge n Vent and N 2 purge systems
Section E – Gas Handling Equipment
n SP1000 PLC Controller for removing process gas during
n 6 Valve Panel cylinder change
n Semi-Automatic Switchover n Automatic cylinder switchover Specialized – Gas Standard SP100 and
n Semi-Automatic with purge based on cylinder pressure or Dependent Options SP1000 Controller Features
n Automatic Switchover weight provides 24/7 gas
n Automatic with Purge availability n DISS or CGA Pigtail connection n PLC Controllers
n Dual Process Outlet n UV/IR Detection (Flammable n Color Touchscreen Operator
n Custom Panel Assemblies and Pyrophoric gases) Interface
Available by Request and Cabinet Accessories n Heat Switch (Flammable gases) n Automatic Purge Routines
Safety Review n Cylinder Shelf
n Autoswitchover requires n Open Rack systems for n Customer Configurable Alarms
external purge panel n Scales Pyrophoric gases stored n Remote Monitoring Capability
n Gas Detection System – outdoors
n Three Cylinder Cabinet – Internal Sensor with Gas n 4 level Customer programmable
Process/Process/Purge Detection Controller/Alarm security codes to prevent
(Gas Dependent) unauthorized access
n Regulator Panels with n UV/IR Detection (Flammable n Remote Monitoring capabilities
Pulse/Purge and Pyrophoric gases)
n SP1000 Controller n Heat Switch (Flammable gases)
n 6 Valve Panels
n Semi-Automatic Switchover n Coaxial outlets with or without i
with Purge monitoring
n Automatic Switchover n Outlet filter (.003 micron) Please consult your local Praxair representative for
with Purge n Weld port on outlet allows ease a wide range of options when ordering Ultra High Purity
n Custom Panel Assemblies of process line installation
Available by Request and Gas Cabinet Systems. We’re here to help!
Safety Review

E•304 1-877-PRAXAIR www.praxairdirect.com