Page 307 - Praxair - Specialty Gases and Equipment Reference Guide

Gas Delivery Systems

Semiconductor Gas Cabinets, Panels and Controllers

Semiconductor Gas Cabinets, Panels and Controllers
Praxair’s one-, two- and three-cylinder gas cabinets are reliable,
easy to use, and are designed with safety as a priority.

Easy to Use
n Self-retracting cylinder ramps assist cylinder changeout
n Recessed cylinder scales
n Skylights for improved internal ambient lighting
n PLC (SurePurge ) or Microprocessor (UltraPurge ) controllers
™
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with intuitive operation
n Minimum 140° door opening allows unencumbered access
n Replaceable bulkhead adapter plates for simplified customer
installation
Safe
UltraPurge 400 SurePurge 1500 –
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n Air intake filters and diffuser for continuous, positive ventilation
n Efficient enclosure design reduces facilities exhaust Gas Cabinet Series Two Cylinder Cabinet
requirements – less than 200 standard cubic feet/minute
(scfm) air flow through the dual cylinder model (300 scfm Standard Features on UltraPurge and SurePurge
through three cylinder enclosure) Gas Cabinets
n Self-closing, self-latching windows and doors
n Raised, perforated floor and bottom filtered air intake eliminate n Both models feature Z-purge for NEC Class 1,
dead pockets around cylinder base Division 2 rated locations
n UL approved fire sprinkler n Dual cabinet outlets
n UV/IR detection for pyrophoric gases n Auto-switchover configuration for continuous gas service
n Four-level passcode protected on controllers to n Exhaust flow monitor
prevent unauthorized use n UltraPurge models
n Integrated to accept multiple customer fault inputs n PLC controller for reliable service
n CE approved on UltraPurge (UP) models, SEMI S2 on n One controller per process panel provides reliability
®
SurePurge (SP) models n Over 10,000 units in service worldwide
n Easy-to-use operator interface
n SurePurge models
Cabinet Configurations n PLC platform
n One-, two- or three-cylinder cabinets available on SurePurge n Open communication protocol through ethernet
and UltraPurge models n SurePurge 100 model replaces UP100 series
Section E – Gas Handling Equipment
n One cylinder cabinet with single process gas panel n SurePurge 1000 model
n Two cylinder cabinets available in process/process or • Readily available PLC with color touch screen reduces cost
process/purge configuration • Replaces UltraPurge for upgrade applications
n Three cylinder cabinets available in process/process/purge n SurePurge 1500 model
configuration • PLC with color touch screen operator interface
n SP8100 model panels • Offers maximum control with user customization and a
n WP5M semiautomatic panel offers safe, basic gas operation wide variety of configurable input and output options
n Manual purge and vent systems reduce cost
n UP2 purge panel provides inert gas for maintenance System Options
operations
n UltraPurge model panels n Automatic cylinder switchover for continuous gas flow
n Automatic valve panels (UP6 – standard, n Cylinder shelves available
UP8 – high pressure purge) n Autoswitch with dual cabinet
n UP2 purge panel provides inert gas for maintenance n Coaxial process outlet with monitoring to accommodate double
operations containment piping
n SurePurge model panels n Light tower for cabinet status
n UP10 with dual valve isolation on purge and vent system n Gas management systems ready on all models
provides the most reliable panel available
n UP2 purge panel provides inert gas for maintenance i
operations Please consult your local Praxair representative for a
wide range of options when ordering Semiconductor Gas
Cabinets, Panels and Controllers. We’re here to help!

E•306 1-877-PRAXAIR www.praxairdirect.com