Page 147 - Praxair - Specialty Gases and Equipment Reference Guide

Electronics

UpTime Sub-Atmospheric Gas Delivery System

A safe, cost-effective dopant gas UpTime Product Family
delivery system for ion implanters
n Enriched Germanium 72
The UpTime sub-atmospheric dopant Tetrafluoride
®
gas delivery system is designed as an n Germanium Tetrafluoride
alternative to existing adsorbent-based n Silicon Tetrafluoride
technology used in ion implanters. n Arsine
Compared to the existing technology, n Phosphine
the UpTime system offers industry n Isotopically Enriched Boron 11
leading product capacity, higher Trifluoride
product purity and a lower cost of n Additional UpTime implant gases
ownership. and mixtures are available upon (A)
Electronics
request
The UpTime system is comprised
of an internal vacuum actuated valve Features (B)
in series with a specially designed n Sub-atmospheric delivery
internal flow restrictor. The UpTime n Internal flow restrictor limits flow
device is designed to operate safely, n SEMI S2 and S8 compliant
®
with two different types of safeguards: n Highest cylinder product capacity
a mechanical actuator and a flow n High product utilization
restrictor.
n Robust safety features
n Ultra-high purity gas

(C)

UpTime Product Family Specifications (ppm)

Gases Ar/O 2 N 2 H 2 O CO CO 2 CH 4 C 2 - C 5 PH 3 AsH 3 HF SO 2 Isotope
Hydrocarbons enrichment
AsH 3 0.5 1 1 0.05 0.05 0.05 0.05 1 – – – –
PH 3 0.5 1 1 0.1 0.1 0.1 0.1 – 0.1 – – –
B F 3 50 25 – – 25 – – – – 25 25 > 99.7%
11
Ge F 4 50 25 – 25 25 – – – – – 25 > 50% to < 52%
72
GeF 4 50 25 – 25 25 – – – – – 25 –
SiF4 50 25 – – 25 – – – – – – –

Cylinder Overall Height Height to Diameter Content (grams)
Style (inches) (A) Connection (inches) (C)
11
(inches) (B) AsH 3 PH 3 B F 3 Ge F 4 GeF 4 SiF 4
72
UT-ELB 16.7 13.9 2 195 100 64 – – 100
UT-4 18 15.3 4.2 1200 520 – – – –
UT-5 18 15.3 4.4 – – – 150 150 –
– – 335 400 400 –
– – 1100* 700 700 575
UT-6 22.5 19.7 6.25 3600 1600 3300* – – 1200
* B F 3 High Capacity fill
11

D•146 1-877-PRAXAIR www.praxairdirect.com