Page 149 - Praxair - Specialty Gases and Equipment Reference Guide

Electronics

Excimer Laser Gas Mixtures

Gas Mixtures for Integrated
Circuit Laser Annealing HCI/Neon (308) 0.5% Hydrogen in Neon
HCI, Hydrogen, Neon, and Xenon Major Components Major Components
Praxair has combined its leading HCI 0.50% H 2 0.50%
Ne
Balance
Balance
Ne
edge precision mixture manufacturing
technology with its captive rare gas Impurities (ppm) < 1 Impurities (ppm) < 0.15
CO + CO 2
CO
production to offer a secure and cost Fe < 1 H 2 O < 5
competitive supply of excimer laser H 2 O < 2 < 5
gas mixtures. N 2
N 2 < 15 O 2 < 1
Praxair’s excimer laser products are O 2 < 2 THC < 0.1
available to support annealing for
Electronics
integrated circuit processing at the
308 nm wavelength. These gas
mixtures have been OEM and Neon 99.999% 10% Xenon in Neon
customer tested in high volume Impurities (ppm) Major Components
manufacturing operations. CH 4 < 0.5 Xe 10%
CO < 0.5 Ne Balance
Key Benefits CO 2 < 0.5 Impurities (ppm)
n OEM and customer tested H 2 O < 0.5 Ar < 5
n Secure raw material supply He < 8 CF 4 < 0.1
n Local production and warehousing N 2 < 1 H 2 O < 1
n High precision analytical and O 2 < 0.5 Kr < 8
production control < 5
N 2
O 2 < 0.5
THC < 0.1

Cylinder Valve Contents Pressure
Per customer CGA or DISS Per customer Per customer
specifications specifications specifications

i

Contact your local Praxair representative
or call 1.877.PRAXAIR to learn more about
other Excimer Laser Gas applications.

D•148 1-877-PRAXAIR www.praxairdirect.com